发明名称 SEMICONDUCTOR MEMORY DEVICE
摘要 A semiconductor memory device according to an embodiment includes a memory cell array including memory cells, the memory cells each configured having a current rectifier element and a variable resistance element connected in series therein. Each of the memory cells has formed on aside surface thereof: a first insulating film provided on aside surface of the current rectifier element and the variable resistance element and having a composition ratio of anon-silicon element to silicon which is a first value; a silicon oxide film provided on a side surface of the first insulating film; and a second insulating film provided on aside surface of the silicon oxide film and having a composition ratio of a non-silicon element to silicon which is a second value. The first value is smaller than the second value.
申请公布号 US2014003127(A1) 申请公布日期 2014.01.02
申请号 US201313778371 申请日期 2013.02.27
申请人 KABUSHIKI KAISHA TOSHIBA 发明人 SAKAMOTO KEI;OKAMURA TAKAYUKI;YASUTAKE NOBUAKI;NISHIMURA JUN
分类号 G11C13/00 主分类号 G11C13/00
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