发明名称 APPARATUS AND METHOD FOR ANALYZING AND MODIFYING A SPECIMEN SURFACE
摘要 The invention refers to a probe assembly for a scanning probe microscope which comprises at least one first probe-adapted for analyzing a specimen, at least one second probe adapted for modifying the specimen and at least one motion element associated with the probe assembly and adapted for scanning one of the probes being in a working position across a surface of the specimen so that the at least one first probe interacts with the specimen whereas the at least one second probe is in a neutral position in which it does not interact with the specimen and to bring the at least one second probe into a position so that the at least one second probe can modify a region of the specimen analyzed with the at least one first probe.
申请公布号 US2014007306(A1) 申请公布日期 2014.01.02
申请号 US201313954617 申请日期 2013.07.30
申请人 CARL ZEISS SMS GMBH 发明人 BAUR CHRISTOF;EDINGER KLAUS;HOFMANN THORSTEN;BARALIA GABRIEL
分类号 G01Q10/00 主分类号 G01Q10/00
代理机构 代理人
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