| 摘要 |
In a method of connecting a multiplicity of optical elements ( 9 ) to a basic body ( 8 ), in particular for producing a faceted mirror ( 1 ), for example for beam mixing and field imaging for an EUV lighting system, the individual optical elements ( 9 ) are positioned on the basic body ( 8, 14 ) and subsequently connected to one another by an galvanoplastic process. Alternatively, the multiplicity of optical elements are aligned on an auxiliary structure ( 11 ) and the optical elements ( 9 ) are subsequently made to grow up galvanoplastically on their rear sides, forming a supporting structure ( 14 ) as the basic body.
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