气体供应设备,申请号TW098141043-传众专利搜索

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发明名称	气体供应设备
摘要
申请公布号	TWI421369	申请公布日期	2014.01.01
申请号	TW098141043	申请日期	2009.12.01
申请人	财团法人工业技术研究院新竹县竹东镇中兴路4段195号	发明人	孙湘平;陈友凡;罗顺远;洪凯祥;吴兴华
分类号	C23C16/455	主分类号	C23C16/455
代理机构		代理人	詹铭文台北市中正区罗斯福路2段100号7楼之1;萧锡清台北市中正区罗斯福路2段100号7楼之1
主权项
地址	新竹县竹东镇中兴路4段195号

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