清洗蚀刻机台之自动清洗方法,申请号TW099118970-传众专利搜索

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发明名称	清洗蚀刻机台之自动清洗方法
摘要
申请公布号	TWI421928	申请公布日期	2014.01.01
申请号	TW099118970	申请日期	2010.06.10
申请人	弘塑科技股份有限公司新竹市香山区中华路6段89号	发明人	王家康;陈文隆;张宏文;颜锡鸿
分类号	H01L21/30	主分类号	H01L21/30
代理机构		代理人	庄志强台北市大安区敦化南路2段71号18楼
主权项
地址	新竹市香山区中华路6段89号

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