基板之处理装置,申请号TW094136304-传众专利搜索

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发明名称	基板之处理装置
摘要
申请公布号	TWI421924	申请公布日期	2014.01.01
申请号	TW094136304	申请日期	2005.10.18
申请人	芝浦机械电子装置股份有限公司日本	发明人	末吉秀树;矶明典
分类号	H01L21/30	主分类号	H01L21/30
代理机构		代理人	恽轶群台北市松山区南京东路3段248号7楼;陈文郎台北市松山区南京东路3段248号7楼
主权项
地址	日本

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