摘要 |
<P>PROBLEM TO BE SOLVED: To produce a thin film which is easily adjustable with a high reproducibility and has extremely uniform thickness in the range of <1 nm to micrometer. <P>SOLUTION: Fluorocarbon is used as an LB material for properly coating prepared matter, using an LB method, in a single layer or thin multiple layers, preferably 1 to 50 separated layers. <P>COPYRIGHT: (C)2006,JPO&NCIPI |