发明名称 THIN FILM USING FLUOROCARBON
摘要 <P>PROBLEM TO BE SOLVED: To produce a thin film which is easily adjustable with a high reproducibility and has extremely uniform thickness in the range of <1 nm to micrometer. <P>SOLUTION: Fluorocarbon is used as an LB material for properly coating prepared matter, using an LB method, in a single layer or thin multiple layers, preferably 1 to 50 separated layers. <P>COPYRIGHT: (C)2006,JPO&NCIPI
申请公布号 JP2006150187(A) 申请公布日期 2006.06.15
申请号 JP20040342069 申请日期 2004.11.26
申请人 CANON INC 发明人 OTTO ALBRECHT
分类号 B05D7/24;B05D1/20;B29C33/62;G02B1/11;G02B5/26;G02B5/28;G11B5/725 主分类号 B05D7/24
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