发明名称 PARAMETER EXTRACTION METHOD AND PARAMETER EXTRACTION PROGRAM
摘要 <p><P>PROBLEM TO BE SOLVED: To provide a parameter extraction method extracting a plurality of parameters included in a model used for simulation reproducing a plurality of measurement values. <P>SOLUTION: This parameter extraction method has: a gradient generation process for finding an error vector, a primary gradient matrix, and a diagonal secondary gradient matrix; a parameter generation process for finding the parameter on the basis of the error vector and the primary gradient matrix; a gradient correction process for correcting the primary gradient matrix on the basis of the diagonal secondary gradient matrix; and a simulation process for obtaining a plurality of simulation values by the simulation based on the model by the parameter found in the parameter generation process. The parameter imparted to the simulation process is determined by a first loop wherein the parameter generation process and the gradient correction process are repeated, and the simulation values are converged on the plurality of measurement values by a second loop wherein the gradient generation process, the first loop, and the simulation process are repeated. <P>COPYRIGHT: (C)2006,JPO&NCIPI</p>
申请公布号 JP2006227847(A) 申请公布日期 2006.08.31
申请号 JP20050039926 申请日期 2005.02.17
申请人 FUJITSU LTD 发明人 MIYASHITA TAKUMI
分类号 G06F19/00;G06F17/17;G06F17/50;H01L21/00;H01L29/00 主分类号 G06F19/00
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