RESIST COATING DEVICE AND RESIST COATING METHOD

摘要

PROBLEM TO BE SOLVED: To provide a resist coating device and a resist coating method for coating a plurality of surfaces of a sample with a resist solution by a uniform coating thickness.

SOLUTION: The resist coating device 1 comprises a sealed device body 2 and a gas introducer 3. The device body 2 is divided into a sample chamber 5 for storing a sample 4 where the inside is made of silicon; a resist solution chamber 7 for storing the resist solution 6; an ultrasonic wave generator 9 for atomizing the resist solution 6, and for storing an ultrasonic generator 8 for generating a spray of particles; and a transporter 10 connecting the sample chamber 5 to the resist solution chamber 7. The sample chamber 5 is provided at the upper portion of the resist solution chamber 7 while sandwiching the carrier section 10.

COPYRIGHT: (C)2007,JPO&INPIT