发明名称 Systems and methods to shape laser light as a line beam for interaction with a substrate having surface variations
摘要 Systems and methods are disclosed for shaping laser light as a line beam for interaction with a film that may have an imperfect, non-planar surface. The system may include a beam stop that defines an edge; a sensor that measures a distance between a selected point on a surface of the film and a reference plane and generates a signal representative of the measured distance; and an actuator coupled to the beam stop and responsive to the signal to move a portion of beam stop edge. Movement of the beam stop edge portion shifts a corresponding portion of the focused line beam in a direction normal to the reference plane to produce a line beam that more closely conforms to the surface profile of the film.
申请公布号 US2007095805(A1) 申请公布日期 2007.05.03
申请号 US20050261846 申请日期 2005.10.28
申请人 CYMER, INC. 发明人 KNOWLES DAVID S.
分类号 B23K26/04 主分类号 B23K26/04
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