| 摘要 |
[Problem] To provide a cordierite sintered body having a low coefficient of thermal expansion and high specific rigidity (=Young's modulus/specific gravity) and mechanical strength, and to provide a member for a semiconductor device composed of this cordierite sintered body. [Solution] This cordierite sintered body has a major crystalline phase of cordierite and contains alumina, mullite, and sapphirine as a secondary crystalline phase, an amorphous phase containing Ca being present at the grain boundary. The crystalline phase ratio of the major crystalline phase is 95-97.5 mass%. The crystalline phase ratio of the secondary crystalline phase is 2.5-5 mass%. The Ca content relative to the total, in terms of CaO, is 0.4-0.6 mass%. |
