CARBON MATERIAL, AND METHOD FOR PRODUCTION THEREOF

摘要

By inhibiting generation of particles, a carbon material and a method of manufacturing the carbon material are provided that can be used in the field of semiconductor manufacturing or the like, in which low dust emission is considered important. A carbon material having a chromium carbide layer formed on a surface of a carbon substrate. The chromium carbide layer is composed of Cr 3 C 2 . The carbon material can be manufactured through a first step of forming a chromium carbide layer containing a chromium carbide other than Cr 3 C 2 on a surface of a carbon substrate, and a second step of heat-treating the carbon substrate under a reducing atmosphere to convert the chromium carbide other than Cr 3 C 2 into Cr 3 C 2 .