发明名称 |
Apparatus and methods for detecting overlay errors using scatterometry |
摘要 |
Disclose is a combined scatterometry mark comprising a scatterometry critical dimension (CD) or profile target capable of being measured to determine CD or profile information and a scatterometry overlay target disposed over the scatterometry CD or profile target, the scatterometry overlay target cooperating with the scatterometry CD or profile target to form a scatterometry mark capable of being measured to determine overlay.
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申请公布号 |
US7289213(B2) |
申请公布日期 |
2007.10.30 |
申请号 |
US20040785732 |
申请日期 |
2004.02.23 |
申请人 |
KLA-TENCOR TECHNOLOGIES CORPORATION |
发明人 |
MIEHER WALTER D.;LEVY ADY;GOLOVANESKY BORIS;FRIEDMANN MICHAEL;SMITH IAN;ADEL MICHAEL E.;FABRIKANT ANATOLY |
分类号 |
G01B11/00;G01B11/14;G01B11/24;G01B11/30;G03F7/20;G03F9/00;H01L21/76;H01L23/544 |
主分类号 |
G01B11/00 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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