发明名称 Double gated transistor and method of fabrication
摘要 Accordingly, the present invention provides a double gated transistor and a method for forming the same that results in improved device performance and density. The preferred embodiment of the present invention uses provides a double gated transistor with asymmetric gate doping, where one of the double gates is doped degenerately n-type and the other degenerately p-type. By doping on of the gates n-type, and the other p-type, the threshold voltage of the resulting device is improved. In particular, by asymmetrically doping the two gates, the resulting transistor can, with adequate doping of the body, have a threshold voltage in a range that enables low-voltage CMOS operation. For example, a transistor can be created that has a threshold voltage between 0V and 0.5V for nFETs and between 0 and -0.5V for pFETs.
申请公布号 US7288445(B2) 申请公布日期 2007.10.30
申请号 US20050125063 申请日期 2005.05.09
申请人 发明人
分类号 H01L21/84;H01L21/336;H01L21/8238;H01L27/092;H01L29/49;H01L29/78;H01L29/786 主分类号 H01L21/84
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