发明名称 |
Method of manufacturing ink jet recording head, ink jet recording head, and ink jet cartridge |
摘要 |
A method of manufacturing an ink jet head which discharges ink, comprising: a step of preparing a silicon substrate; a step of forming a membrane having a layer in which a plurality of holes are disposed to constitute a filter mask, and a layer with which a first surface is coated in such a manner that the first surface is not exposed from the plurality of holes on the first surface of the substrate; a step of forming a close contact enhancing layer on the membrane formed on the substrate; a step of forming a channel constituting member on the close contact enhancing layer to constitute a plurality of discharge ports and a plurality of ink channels communicating with the plurality of discharge ports; a step of forming an ink supply port communicating with the plurality of ink channels in the silicon substrate by anisotropic etching from a second surface facing the first surface of the substrate; and a step of forming a filter in a portion of the close contact enhancing layer positioned in an opening of the ink supply port using the layer of the membrane in which a plurality of holes are disposed as the mask.
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申请公布号 |
US7287847(B2) |
申请公布日期 |
2007.10.30 |
申请号 |
US20040990492 |
申请日期 |
2004.11.18 |
申请人 |
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发明人 |
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分类号 |
B41J2/175;B41J2/045;B41J2/055;B41J2/16 |
主分类号 |
B41J2/175 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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