| 摘要 |
<p><P>PROBLEM TO BE SOLVED: To provide a flow sensor capable of sufficiently correcting temperature even if there is a difference between fluid temperature and ambient temperature. <P>SOLUTION: A flow sensor comprises a pair of temperature sensors 14, 15 positioned at the upper stream P and the lower stream Q in the flow direction of fluid on the surface of a silicone substrate 11; a microheater 13 positioned between a pair of the temperature sensors 14, 15 on the surface of the silicone substrate 11; and a reference resistance 16 for measuring an ambient temperature provided on the silicone substrate 11 so as not to directly contact with the fluid. <P>COPYRIGHT: (C)2008,JPO&INPIT</p> |
