| 摘要 |
<p><P>PROBLEM TO BE SOLVED: To provide a chemical supply device capable of accurately discharging a chemical solution. <P>SOLUTION: The chemical supply device 10a is used to discharge a chemical solution in a chemical tank 25 out of an application nozzle 27. The device 10a includes a combined member 13 having a pump case 11 and a cylinder 12 as an integrated unit, a flexible tube 15 that is a pump member is provided in the pump case 11 to partition a pump chamber 16 on the inside and a driving chamber 17 on the outside. A piston 31 for forming a driving chamber 33 is incorporated to a cylinder 12, and non-compressive mediums 35 are sealed in both the driving chambers 17 and 33, so that the pump chamber 16 is expanded and contracted by reciprocating the piston 31 by a motor 49. The clearance between the piston 31 and the cylinder 12 is covered with a bellows cover 61, and the non-compressive mediums 35 leaked between the piston 31 and the cylinder 12 enter into seal chambers 66a and 66b without being leaked to the outside. <P>COPYRIGHT: (C)2008,JPO&INPIT</p> |
