| 摘要 |
PROBLEM TO BE SOLVED: To register easily and surely a target position of a hand unit for carrying in/out a dispensation tool such as an inspection plate, relative to even a placing position whose inside cannot be not seen. SOLUTION: A placing position specified by positioning guides 19a-19D on the front side and on the back side disposed on a prescribed position 8 is registered beforehand on the target position by a teaching method, and then the hand unit 14 is moved by an XZ-driving mechanism 15 to the target position, and the dispensation tool grasped by a hand is positioned and placed on the placing position, and the dispensation tool is grasped. Thereafter, the target position is registered based on a relative position between a suspension position of the hand unit and a guide reference position when a rear face part 21A of the second reference plate 20 grasped by the hand unit butts at a front face part 20A of the first reference plate by using the first reference plate specified by each positioning guide on the front side and on the back side and the second reference plate 21 grasped by the hand unit 14, when controlling movement. COPYRIGHT: (C)2008,JPO&INPIT |
