Capacitor with single crystal tantalum oxide layer and method for fabricating the same

摘要

A capacitor and a method for fabricating the same are provided. The capacitor includes: a substrate; an inter-layer insulation layer formed over the substrate and including a contact hole; a storage node formed over the inter-layer insulation layer and filled into the contact hole; a tantalum oxide layer of single crystal formed over the storage node; and a plate formed over the tantalum oxide layer.