| 摘要 |
A substrate processing apparatus is provided to reduce generation of corrosion and contamination due to chemicals by transferring the chemicals to chemical collection ducts. A substrate(200) is loaded on a carrier(110). A bowl(120) is arranged at the outside of the carrier. The bowl includes chemical collection ducts(120a-120c) provided from the substrate. A chemical collection plate(150) is arranged around a lower part of the carrier to guide the chemicals supplied from the substrate to the chemical collection ducts. The chemical collection plate has a rotatable function. The chemical collection plate is rotated independently of the carrier. A first rotary shaft(140) includes a first motor(130) for rotating the carrier. A second rotary shaft(180) includes a second motor(160) for rotating the chemical collection plates. A power transmission unit transmits the rotatory power of the second motor to the second rotary shaft.
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