发明名称 Rotational comb drive Z-stage
摘要 A device may have an outer frame, a platform, and a plurality of actuators configured to move the platform with respect to the outer frame. Each of the actuators may have a movable frame and a fixed frame. A motion control mechanism may be configured to permit movement of the platform in a desired direction with respect to the outer frame and inhibit rotation of the platform with respect to the outer frame.
申请公布号 US8619378(B2) 申请公布日期 2013.12.31
申请号 US20100946515 申请日期 2010.11.15
申请人 GUTIERREZ ROMAN C.;DIGITALOPTICS CORPORATION MEMS 发明人 GUTIERREZ ROMAN C.
分类号 G02B7/02 主分类号 G02B7/02
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