ARC EVAPORATION SOURCE

摘要

[PROBLEMS] To provide an arc evaporation source in which the arc spot is prevented from moving to another part other than the cathode evaporation surface. [MEANS FOR SOLVING PROBLEMS] An arc evaporation source for evaporating the cathode substance of a cathode (22) by arc electric discharge controlled by a magnetic field. The arc evaporation source comprises a magnetic field producing mechanism (42) adapted for producing a magnetic field (M) having a strong component parallel to the cathode central axis (Ax) near the evaporation surface (22a) at the end of the cathode and disposed outside the cathode, a support mechanism (26) supporting the cathode, a cooling mechanism (61) for cooling the cathode, and a tapered ring (64) having a truncated cone shape and a through-hole through which the cathode extends in the axial direction of the truncated cone and tapered towards the evaporation surface. The tapered ring (64) is made of a ferromagnetic material. The edge (64a) of the tapered ring is moved to a position flush with the evaporation surface or a little behind the evaporation surface when in use.