| 摘要 |
An apparatus for detecting the position of a semiconductor wafer is provided to improve yield and prevent a wafer from being damaged by previously detecting a position error of a wafer. A weight sensor(30) detects the weight of a wafer(10), attached to a lift pin inserted through a support hole of a wafer support unit. A control part(80) processes a signal detected by the weight sensor to determine the weight of the wafer. An alarm part(90) generates an alarm sound according to the determination of the control part.
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