LASER MACHINNING METHOD AND THE APPARATUS ADOPTING THE SAME

摘要

Disclosed are a laser processing method and a laser processing apparatus. The disclosed laser processing method separates a processing object vertically to a thickness direction by irradiating the inside of the processing object having a permeable base layer and a functional element layer with a laser beam along a cutting proposed line through the adjustment of a light converging point and comprises: a step for mounting the processing object on a stage in order for the permeable base layer to be toward an upper side; a step for detecting the position of a first surface, which is the interface of the permeable base layer and the functional element layer by irradiating the mounted processing object with a beam for measurement; and a step for adjusting the beam to a light converging point in the thickness direction from the first surface based on the detected position information of the first surface. [Reference numerals] (110) Laser oscillator;(131) Light converging lens;(300) Position detect part;(400) Position control part