| 摘要 |
PURPOSE: A device and a method for mounting a substrate and a coating apparatus and a coating method having the same are provided to prevent damage to a nozzle device by maintaining a state of fixing a substrate in a coating jig. CONSTITUTION: A transfer device (250) transfers substrates onto accommodating parts. A guide jig (270) is placed on a coating jig. The guide jig includes guide grooves. Lift pins (264) pass through the accommodating parts and the guide grooves. An elevating device (260) elevates the lift pins. |
