发明名称 Method for forming coating film on facet of semiconductor optical device
摘要 The method includes the steps of preparing an epitaxial wafer by forming a multilayer semiconductor structure on a main surface of a substrate; forming stripe electrodes and bonding pads on the multilayer semiconductor structure with the bonding pads being respectively electrically connected to the stripe electrodes; forming a projection portion on the multilayer semiconductor structure; forming laser diode (LD) bars by cutting the epitaxial wafer; arranging the LD bars on a support surface such that a side surface thereof is oriented normal to the support surface, and disposing spacers between the LD bars; and forming a coating film on the side surface. The projection portion has a height, measured from the main surface of the substrate, greater than a height of the stripe electrodes. Furthermore, the laser diode bar has at least one projection portion.
申请公布号 US8617911(B2) 申请公布日期 2013.12.31
申请号 US201213359604 申请日期 2012.01.27
申请人 ONISHI YUTAKA;SUMITOMO ELECTRIC INDUSTRIES, LTD. 发明人 ONISHI YUTAKA
分类号 H01L21/00 主分类号 H01L21/00
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