| 摘要 |
In a method for manufacturing a glass substrate for a solar cell, metal oxides serving as a target are mounted on a target support located in a chamber, and a substrate is mounted on a susceptor located in the chamber. A targeting angle between the substrate and the target is adjusted, and then the target material is deposited onto the substrate to thereby form a textured metal oxide film. Here, the targeting angle is defined as an angle formed between the substrate and a normal line of the target surface. |
