| 摘要 |
An apparatus having a linear structure that enables real time measurement of the spatial profile, circularity, centroid, astigmatism and M2 values of a laser beam generated by a low power laser beam. A laser beam source transmits a laser beam through a focusing lens, a Fabry-Perot resonator, a pair of polarizers and a camera that detects spots of light that pass through the first and second mirrors and the polarizers. The resonator includes a pair of high reflecting mirror plates disposed in parallel, spaced apart relation to one another at a common angle of incidence to the laser beam. The polarizers are disposed at an opposite angle of incidence and are rotationally adjustable to enable intensity adjustment of the camera. |
