| 发明名称 |
Double dual slot load lock chamber |
| 摘要 |
Provided herein is a double dual slot load lock chamber. The double dual slot load lock chamber includes two isolated load lock regions that are vertically stacked and share a common wall, wherein each isolated load lock region comprises two substrate slots. |
| 申请公布号 |
US8616820(B2) |
申请公布日期 |
2013.12.31 |
| 申请号 |
US20070926720 |
申请日期 |
2007.10.29 |
| 申请人 |
KURITA SHINICHI;BLONIGAN WENDELL T.;APPLIED MATERIALS, INC. |
发明人 |
KURITA SHINICHI;BLONIGAN WENDELL T. |
| 分类号 |
H01L21/00;B65G47/90;H01L21/67;H01L21/677 |
主分类号 |
H01L21/00 |
| 代理机构 |
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代理人 |
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| 主权项 |
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| 地址 |
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