| 发明名称 |
Nano-filter and method of forming same, and method of filtration |
| 摘要 |
The disclosure relates generally to nano-filters and methods of forming same, and methods of filtration. The nano-filter includes a substrate and at least one nanowire structure located between an inlet and an outlet. The nanowire structure may include a plurality of vertically stacked horizontal nanowires. |
| 申请公布号 |
US8617412(B2) |
申请公布日期 |
2013.12.31 |
| 申请号 |
US20100966370 |
申请日期 |
2010.12.13 |
| 申请人 |
ANDERSON BRENT A.;BRYANT ANDRES;NOWAK EDWARD J.;SLEIGHT JEFFREY W.;INTERNATIONAL BUSINESS MACHINES CORPORATION |
发明人 |
ANDERSON BRENT A.;BRYANT ANDRES;NOWAK EDWARD J.;SLEIGHT JEFFREY W. |
| 分类号 |
C23F3/00;B01D29/46;H01L21/02 |
主分类号 |
C23F3/00 |
| 代理机构 |
|
代理人 |
|
| 主权项 |
|
| 地址 |
|
