发明名称 |
Direct derivative feedforward vibration compensation system |
摘要 |
Methods and apparatus for providing vibration compensation using position measurements are disclosed. According to one aspect of the present invention, a method of compensating for vibrations of an object includes obtaining a plurality of position measurements associated with the object. The method also includes processing the plurality of position measurements to determine a derivative acceleration, and determining a compensatory force to counteract the vibrations of the object. Determining the compensatory force includes using the derivative acceleration. Finally, the method includes applying the compensatory force to the object. |
申请公布号 |
US8619361(B2) |
申请公布日期 |
2013.12.31 |
申请号 |
US20100750713 |
申请日期 |
2010.03.31 |
申请人 |
HSIN YI-PING;ISAGO SUSUMU;MASAKI KAZUO;YUAN BAUSAN;NIKON CORPORATION |
发明人 |
HSIN YI-PING;ISAGO SUSUMU;MASAKI KAZUO;YUAN BAUSAN |
分类号 |
G02B27/64;A61N5/00;B82Y10/00;G03F7/20 |
主分类号 |
G02B27/64 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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