发明名称 Direct derivative feedforward vibration compensation system
摘要 Methods and apparatus for providing vibration compensation using position measurements are disclosed. According to one aspect of the present invention, a method of compensating for vibrations of an object includes obtaining a plurality of position measurements associated with the object. The method also includes processing the plurality of position measurements to determine a derivative acceleration, and determining a compensatory force to counteract the vibrations of the object. Determining the compensatory force includes using the derivative acceleration. Finally, the method includes applying the compensatory force to the object.
申请公布号 US8619361(B2) 申请公布日期 2013.12.31
申请号 US20100750713 申请日期 2010.03.31
申请人 HSIN YI-PING;ISAGO SUSUMU;MASAKI KAZUO;YUAN BAUSAN;NIKON CORPORATION 发明人 HSIN YI-PING;ISAGO SUSUMU;MASAKI KAZUO;YUAN BAUSAN
分类号 G02B27/64;A61N5/00;B82Y10/00;G03F7/20 主分类号 G02B27/64
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