| 摘要 |
<p>Even if an outer part of a work unit touches an inner wall of a cassette, the work unit can be stored in the cassette. A robot hand (2) includes a placement surface (20) for a work unit (8) by having the degree of freedom in a horizontal direction, a fall preventing claw formed on an end part (20) and preventing a fall of the work unit (8) from the placement surface (20) by supporting a front end part (9a) of the work unit (8) on the placement surface (20), and a support part (22) supporting a rear end part (9b) of the work unit (8) and placed around an installation part (24). When external force is applied to the work unit (8), the support part (22) touches the rear end part (9b) and rotates the work unit (8) on the placement surface (20) around the touched point. Therefore, even if an outer part (52) of the work unit (8) touches an inner wall (43) of a cassette (4), the work unit (8) can be stored in the cassette (4) by properly modifying a position error of the work unit (8).</p> |
