发明名称 |
OPTICAL ENDPOINT DETECTION SYSTEM |
摘要 |
Methods and apparatus for determining an endpoint of a process chamber cleaning process are provided. In some embodiments, a processing system having an endpoint detection system may include a process chamber having internal surfaces requiring periodic cleaning due to processes performed in the process chamber; and an endpoint detection system that includes a light detector positioned to detect light reflected off of a first internal surface of the process chamber; and a controller coupled to the light detector and configured to determine an endpoint of a cleaning process based upon the detected reflected light. |
申请公布号 |
SG194450(A1) |
申请公布日期 |
2013.12.30 |
申请号 |
SG20130075577 |
申请日期 |
2012.04.27 |
申请人 |
APPLIED MATERIALS, INC. |
发明人 |
RAMACHANDRAN, BALASUBRAMANIAN;ISHII, MASATO;HUNTER, AARON MUIR |
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