| 摘要 |
<P>PROBLEM TO BE SOLVED: To provide a charged particle emission device with a high performance and a long life, capable of stably generating plasma. <P>SOLUTION: This charged particle emission device (4b) comprises a chamber (22) having a plasma generation space (22a) formed inside, an induction magnetic field generation coil (26) for generating an induction magnetic field for generating plasma in the plasma generation space (22a) in energization, a gas supply source (21) for supplying gas for generating plasma inside the chamber (22), and a discharge electrode (24) having a pair of charging ends (24a, 24b) opposed to each other inside the chamber (22), arranged in the plasma generation space (22a), flowing an induction current by an electromagnetic induction by the induction magnetic field inside, and supplying electrons for generating the plasma by generating discharge between the discharging ends (24a, 24b). <P>COPYRIGHT: (C)2009,JPO&INPIT |
