| 摘要 |
The present invention relates to a method and an apparatus for effectively cleaning the surface of a workpiece to be cleaned, in which organic substances, organic compounds, inorganic substances, and inorganic compounds are mixed, by using plasma ions. The cleaning apparatus using the separation and acceleration of the plasma ions according to the present invention includes a plasma generator and a magnetic field generating unit. The plasma generator generates ions in a plasma state in order to clean the surface of the workpiece and discharges the ions toward the workpiece. The plasma generator includes an outlet for discharging the ions in the plasma state. The magnetic field generating unit separates ions in the plasma state, which are discharged from the outlet of the plasma generator, into cations and anions to collide with the surface of the workpiece. The magnetic field generating unit is installed at the front of the outlet of the plasma generator perpendicularly to the forward direction of the ions to generate a magnetic field. According to the cleaning method and apparatus using the separation and the acceleration of the plasma ions of the present invention, the plasma ions are separated into cations and anions to effectively clean the surface of the workpiece in which organic substances, organic compounds, inorganic substances, or inorganic compounds are mixed. [Reference numerals] (AA) Steam or water injection;(BB,CC) Magnetic flux direction;(DD) Board transfer direction |
