PLATE GENERATING APPARATUS

摘要

A substrate processing apparatus is provided to efficiently perform the exhaust liquid processing by effectively separating the substrate processing apparatus. The exhaust liquid processing is performed in the inside of the exhaust chamber(100). The exhaust chamber is connected to the exhaust pipe(130) connected to the processing chamber. The exhaust filter part(200) is formed inside of the evacuated chamber. The exhaust liquid used for the substrate processing process is transferred to the exhaust chamber through the exhaust pipe. The exhaust filter part is supported by the filter supporting board(120). The exhaust filter part comprises the exhaust net(220) filtering the exhaust liquid and the exhaust net supporting part(210) forming the exhaust liquid input passage. The exhaust net supporting part comprises the lateral part collecting the exhaust liquid and the bottom surface connected to the exhaust net.