COMPRESSION MEMBER FOR USE IN SHOWERHEAD ELECTRODE ASSEMBLY

摘要

OF THE DISCLOSURE COMPRESSION MEMBER FOR USE IN SHOWERHEAD ELECTRODE ASSEMBLYA compression member for use in a showerhead electrode assembly of a capacitively coupled plasma chamber. The member applies a compression force to a portion of a film heater adjacent a power supply boot on an upper surface of a thermal control plate and is located between the thermal control plate and a temperature-controlled top plate. The member is composed of an electrically insulating elastomeric material which can work over a large range of compressions and temperatures.FIG. 1