发明名称 |
GLASS INSPECTION DEVICE AND INSPECTION METHOD THEREOF |
摘要 |
The present invention relates to a device and a method for inspecting a glass substrate and, more specifically, a device and a method for inspecting a glass substrate which perform a second high resolution inspection for a defective point detected during a first inspection after the first inspection, thereby improving the performance and reliability of inspection and reducing inspection costs. The glass substrate inspection device according to the present invention comprises: a fixed unit installed in a working space; a first photographing unit which is installed at the upper or lower part of the front end of the fixed unit which receives a glass substrate and taking a first image of the glass substrate; a second photographing unit which is installed at the upper or lower part of the rear end of the fixed unit which discharges the glass substrate and taking a second image of the transferred glass substrate; and a glass substrate inspection device for receiving the images photographed by the first and second photographing units and inspecting the surface state of the glass substrate. |
申请公布号 |
KR20130141950(A) |
申请公布日期 |
2013.12.27 |
申请号 |
KR20120065103 |
申请日期 |
2012.06.18 |
申请人 |
SEMISYSCO CO., LTD. |
发明人 |
LEE, SOON JONG;WOO, BONG JOO;KANG, JI HO;JUN, EUN JI |
分类号 |
G01N21/88;G02F1/13 |
主分类号 |
G01N21/88 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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