发明名称 GLASS INSPECTION DEVICE AND INSPECTION METHOD THEREOF
摘要 The present invention relates to a device and a method for inspecting a glass substrate and, more specifically, a device and a method for inspecting a glass substrate which perform a second high resolution inspection for a defective point detected during a first inspection after the first inspection, thereby improving the performance and reliability of inspection and reducing inspection costs. The glass substrate inspection device according to the present invention comprises: a fixed unit installed in a working space; a first photographing unit which is installed at the upper or lower part of the front end of the fixed unit which receives a glass substrate and taking a first image of the glass substrate; a second photographing unit which is installed at the upper or lower part of the rear end of the fixed unit which discharges the glass substrate and taking a second image of the transferred glass substrate; and a glass substrate inspection device for receiving the images photographed by the first and second photographing units and inspecting the surface state of the glass substrate.
申请公布号 KR20130141950(A) 申请公布日期 2013.12.27
申请号 KR20120065103 申请日期 2012.06.18
申请人 SEMISYSCO CO., LTD. 发明人 LEE, SOON JONG;WOO, BONG JOO;KANG, JI HO;JUN, EUN JI
分类号 G01N21/88;G02F1/13 主分类号 G01N21/88
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