TEST OBJECT FOR CALIBRATING TRANSMISSION ELECTRON MICROSCOPES

摘要

FIELD: physics.SUBSTANCE: invention relates to calibration of transmission electron microscopes (TEM) when taking measurements in nano- and sub-nanometre ranges. The test object is in form of a sample holder with multiple places for mounting analysed objects, in one of which there is a reference structure in form of a thin cross section of a silicon structure with a periodic relief surface, having a known interplanar distance and known dimensions of trapezoid elements of the relief.EFFECT: high accuracy of calibrating TEM, which increases accuracy measuring length of sections which characterise the profile of the relief element in a wide range of lengths using TEM, simultaneous determination of the scaling coefficient of TEM on two axes and linearity and orthogonality of said axes.9 dwg