NANO STRUCTURES IN FLEXABLE SUBSTRATE AND PRODUCING METHOD THEREOF

摘要

The present invention relates to a flexible substrate with a nanopattern and a manufacturing method thereof. The method for manufacturing the flexible substrate with the nanopattern according to the present invention includes the steps of: forming a zinc oxide buffer layer on the flexible substrate; manufacturing a zinc oxide nanostructure on the zinc oxide buffer layer; performing a first etching process on the zinc oxide buffer layer; performing a second etching process on the flexible substrate by using the zinc oxide nanostructure as a mask; and performing a third etching process on the zinc oxide buffer layer and the zinc oxide nanostructure. Therefore, the flexible substrate on which the nanopattern is directly formed is obtained. [Reference numerals] (AA) Start;(BB) End;(S11) Form a zinc oxide buffer layer on the flexible substrate;(S12) Manufacture a zinc oxide nanostructure on the zinc oxide buffer layer;(S13) Perform a first etching process on the zinc oxide buffer layer;(S14) Perform a second etching process on the flexible substrate by using the zinc oxide nanostructure as a mask;(S15) Perform a third etching process on the zinc oxide buffer layer and the zinc oxide nanostructure;(S16) Obtain a flexible substrate with nanopatterns