SUBSTRATE TRANSPORT SYSTEM

摘要

The system is provided with: a substrate delivery unit (2) including a moveable rack (21) and a lifting/lowering unit (22) for lowering the moveable rack (21); a levitation unit (3) including one or more outlets (35) for blowing a gas upward, the outlets being constituted such that a substrate supported on the moveable rack is levitated by the pressure of the gas blown from the outlets once the moveable rack has been lowered by the lifting/lowering unit; and a transport unit (4) including a transport conveyor (40) and claw parts (41) that stand upright from the transport conveyor, and constituted such that the claw parts push, in the direction of transport, a substrate (W) that is being levitated by the pressure of the gas blown from the outlets.