ELECTROSTATICALLY EXCITED CANTILEVER SENSORS

摘要

The purpose of the present invention is to provides an electrostatically driven cantilever sensor which can be easily manufactured and measure biomaterials. In order to achieve the purpose, the electrostatically driven cantilever sensor including a cantilever, which collects a specific substance and measures the mass of the specific substance by using a change in natural frequency, according to the present invention comprises: an upper substrate which is made of transparent material and includes an electrode space formed on the bottom by etching; a first electrode which is transparent and made of ITO on the bottom of the upper substrate; and lower substrate which is connected to the lower part of the upper substrate. The lower substrate includes: a fixing part which is connected to the upper substrate; the cantilever which is formed by being extended from the fixing part; a silicon layer which is formed on the bottom of the fixing part; a lever space which is formed between the silicon layer and the cantilever; and a second electrode which is formed on the top of the cantilever.