发明名称 UNDER LAYER FILM-FORMING COMPOSITION FOR IMPRINTS AND METHOD OF FORMING PATTERN
摘要 Provided is the under layer film excellent in the surface planarity. An under layer film-forming composition for imprints comprising a (meth)acrylic resin (A) containing an ethylenic unsaturated group(P) and a nonionic hydrophilic group (Q), and having a weight average molecular weight of 1,000 or larger; and a solvent (B), the resin(A) having an acid value of smaller than 1.0 mmol/g, and an under layer film-forming composition for imprints comprising a (meth)acrylic resin (A2) containing an ethylenic unsaturated group (P), and containing, as a nonionic hydrophilic group (Q), a cyclic substituent (Q2) having a carbonyl group in the cyclic structure thereof, with a weight average molecular weight of 1,000 or larger; and a solvent (B).
申请公布号 WO2013191228(A1) 申请公布日期 2013.12.27
申请号 WO2013JP66899 申请日期 2013.06.13
申请人 FUJIFILM CORPORATION 发明人 KITAGAWA, HIROTAKA;HATTORI, AKIKO;ENOMOTO, YUICHIRO
分类号 H01L21/027;B29C59/02;C08F8/00 主分类号 H01L21/027
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