RECTANGULAR PARALLELEPIPED FLUID STORAGE AND DISPENSING VESSEL

摘要

PROBLEM TO BE SOLVED: To downsize a device for storing and supplying many kinds of semiconductor gases at low pressure.SOLUTION: A fluid storage and dispensing apparatus including a fluid storage and dispensing vessel having a rectangular parallelepiped shape, and an integrated gas cabinet assembly including such fluid storage and dispensing apparatus and/or a point-of-use ventilation gas scrubber in a vented gas cabinet are disclosed. By the use of physical adsorbent and chemical sorbent medium, the gas cabinet can be enhanced in safety of operation, e.g., where the process gas supplied from the gas cabinet is of a toxic or otherwise hazardous character.