SINGLE CRYSTAL GROWING APPARATUS

摘要

PROBLEM TO BE SOLVED: To provide a single crystal growing apparatus in which a silicon single crystal in which axial resistivity distribution is uniform can be grown with excellent energy efficiency.SOLUTION: A single crystal growing apparatus includes: a crystal growing chamber for growing a silicon single crystal; a raw material supply chamber for supplying a melt to the crystal growing chamber; and a melt supply pipe that connects the crystal growing chamber and the raw material supply chamber, wherein an outer diameter of a quartz crucible in the crystal growing chamber is 2-5 times of a diameter of the growing silicon single crystal and an aspect ratio of the quartz crucible (outer diameter/height) is 2-10.