发明名称 |
MESOSTRUCTURE, METHOD OF MANUFACTURING THE SAME, AND X-RAY SPECTROSCOPY ELEMENT |
摘要 |
PROBLEM TO BE SOLVED: To provide a mesostructure having a hexagonal structure, wherein a normal line of a surface having high intensity of X-ray diffraction in the hexagonal structure is parallel to a substrate.SOLUTION: A mesostructure is formed on a substrate and has a periodic structure of 2 nm or more and 50 nm or less. The mesostructure includes a plurality of holes so that the periodic structure becomes a two-dimensional hexagonal structure in a section perpendicular to the substrate. The plurality of holes are cylindrical holes oriented in one direction in the substrate surface. A <10> direction of the two-dimensional hexagonal structure is parallel to the substrate, and is perpendicular to the one direction. |
申请公布号 |
JP2013256418(A) |
申请公布日期 |
2013.12.26 |
申请号 |
JP20120134113 |
申请日期 |
2012.06.13 |
申请人 |
CANON INC |
发明人 |
MIYATA HIROKATSU;KUBO WATARU;WATANABE TAKETOSHI |
分类号 |
C01B37/00 |
主分类号 |
C01B37/00 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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