发明名称 MESOSTRUCTURE, METHOD OF MANUFACTURING THE SAME, AND X-RAY SPECTROSCOPY ELEMENT
摘要 PROBLEM TO BE SOLVED: To provide a mesostructure having a hexagonal structure, wherein a normal line of a surface having high intensity of X-ray diffraction in the hexagonal structure is parallel to a substrate.SOLUTION: A mesostructure is formed on a substrate and has a periodic structure of 2 nm or more and 50 nm or less. The mesostructure includes a plurality of holes so that the periodic structure becomes a two-dimensional hexagonal structure in a section perpendicular to the substrate. The plurality of holes are cylindrical holes oriented in one direction in the substrate surface. A <10> direction of the two-dimensional hexagonal structure is parallel to the substrate, and is perpendicular to the one direction.
申请公布号 JP2013256418(A) 申请公布日期 2013.12.26
申请号 JP20120134113 申请日期 2012.06.13
申请人 CANON INC 发明人 MIYATA HIROKATSU;KUBO WATARU;WATANABE TAKETOSHI
分类号 C01B37/00 主分类号 C01B37/00
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