| 摘要 |
PROBLEM TO BE SOLVED: To provide an inspection device capable of reducing influences of dusts etc. included in an antioxidation gas, which prevents the oxidation of a probe needle, on the electric inspection of an inspected body.SOLUTION: An inspection device places a tip of a probe needle 12 attached to a probe card 11 in contact with an electrode pad formed on a surface of an inspected body 14 in a wafer state thereby conducting electric inspection of the inspected body 14. The inspection device includes: gas supply means 16 which supplies an antioxidation gas, which prevents the oxidation of the tip of the probe needle 12, to the tip of the probe needle 12; a gas supply line 17 which receives the antioxidation gas and supplies the antioxidation gas to the gas supply means 16; and a first filter device 18 which is disposed on the gas supply line 17 and removes dust included in the antioxidation gas. |
