| 发明名称 |
ALUMINIUM OXIDE-BASED METALLISATION BARRIER |
| 摘要 |
The present invention relates to aluminium oxide-based passivation layers which simultaneously act as diffusion barrier for underlying wafer layers against aluminium and other metals. Furthermore, a process and suitable compositions for the production of these layers are described. |
| 申请公布号 |
US2013341769(A1) |
申请公布日期 |
2013.12.26 |
| 申请号 |
US201214004074 |
申请日期 |
2012.02.09 |
| 申请人 |
KOEHLER INGO;DOLL OLIVER;STOCKUM WERNER;BARTH SEBASTIAN;MERCK PATENT GMBH |
发明人 |
KOEHLER INGO;DOLL OLIVER;STOCKUM WERNER;BARTH SEBASTIAN |
| 分类号 |
H01L31/0216 |
主分类号 |
H01L31/0216 |
| 代理机构 |
|
代理人 |
|
| 主权项 |
|
| 地址 |
|
