发明名称 CUTTING DEVICE
摘要 PROBLEM TO BE SOLVED: To provide a cutting device capable of eliminating all of steps in which a cutting blade cuts into a chuck table during a set-up operation for detecting an original point defining height of the cutting blade when the cutting blade is in contact with the chuck table, and capable of introducing a nonconductive cutting blade without deterioration of a state of a tip of the cutting blade or failures such as wrong detection due to cutting liquid.SOLUTION: In the cutting device, a first height position of a detection section contacting a chuck table, a second height position of the detection section when blocking light from a light emission section, a third height position of a cutting blade when blocking the light from the light emission section, and a difference α between the first height position and the second height position are found, and a position found by adding the difference α to the third height position is defined as an original point.
申请公布号 JP2013258205(A) 申请公布日期 2013.12.26
申请号 JP20120132195 申请日期 2012.06.11
申请人 DISCO ABRASIVE SYST LTD 发明人 KUBO MASAHIRO;SHIGEMATSU YOSUKE
分类号 H01L21/301 主分类号 H01L21/301
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