| 摘要 |
PROBLEM TO BE SOLVED: To provide an objective system capable of increasing an NA value of the objective system.SOLUTION: In an objective system, a focusing lens element and each field lens element are formed of the same single glass material. All constituents of a Mangin mirror assembly, a field lens element assembly and a focusing lens element assembly are arranged along an axis of received light energy. In the Mangin mirror assembly, two reflective surfaces of one or more Mangin mirror elements are mirror surfaces distant from each other by non-zero distance along the axis of the received light energy. |
